MEMS-based accelerometers are increasingly deployed in harsh environments where mechanical stress is not just expected but constant.

Microelectromechanical systems (MEMS) are microscopic devices comprised of electronics and mechanical parts. Many recent sensor designs leverage MEMS technology for their high precision and ...

Semiconductor engineers leveraged manufacturing techniques developed for computer chips to create microscopic MEMS devices. Fabrication methods for MEMS sensors, such as layer deposition, ...